Chemical vapor deposition with energy input

ABSTRACT

Methods of depositing compound semiconductors onto substrates are disclosed, including directing gaseous reactants into a reaction chamber containing the substrates, selectively supplying energy to one of the gaseous reactants in order to impart sufficient energy to activate that reactant but insufficient to decompose the reactant, and then decomposing the reactant at the surface of the substrate in order to react with the other reactants. The preferred energy source is microwave or infrared radiation, and reactors for carrying out these methods are also disclosed.

CROSS-REFERENCE TO RELATED APPLICATIONS

The present application is a divisional of U.S. patent application Ser.No. 12/587,228, filed Oct. 2, 2009, which claims the benefit of thefiling date of U.S. Provisional Patent Application No. 61/195,093 filedOct. 3, 2008, the disclosure of which is hereby incorporated herein byreference.

FIELD OF THE INVENTION

The present invention relates generally to chemical vapor depositionmethods and apparatus.

BACKGROUND OF THE INVENTION

Chemical vapor deposition involves directing one or more gasescontaining chemical species onto a surface of a substrate so that thereactive species react and form a deposit on the surface. For example,compound semiconductors can be formed by epitaxial growth of asemiconductor material on a substrate. The substrate typically is acrystalline material in the form of a disc, commonly referred to as a“wafer.” Compound semiconductors such as III-V semiconductors commonlyare formed by growing layers of the compound semiconductor on a waferusing metal organic chemical vapor deposition or “MOCVD.” In thisprocess, the chemical species are provided by a combination of gases,including one or more metal organic compounds such as alkyls of theGroup III metals gallium, indium, and aluminum, and also including asource of a Group V element such as one or more of the hydrides of oneor more of the Group V elements, such as NH₃, AsH₃, PH₃ and hydrides ofantimony. These gases are reacted with one another at the surface of awafer, such as a sapphire wafer, to form a III-V compound of the generalformula In_(X)Ga_(Y)Al_(Z)N_(A)As_(B)P_(C)Sb_(D) whereX+Y+Z=approximately 1, and A+B+C+D=approximately 1, and each of X, Y, Z,A, B, C, and D can be between 0 and 1. In some instances, bismuth may beused in place of some or all of the other Group III metals.

In this process, the wafer is maintained at an elevated temperaturewithin a reaction chamber. The reactive gases, typically in admixturewith inert carrier gases, are directed into the reaction chamber.Typically, the gases are at a relatively low temperature, as forexample, about 50° C. or below, when they are introduced into thereaction chamber. As the gases reach the hot wafer, their temperature,and hence their available energy for reaction, increases.

As used in this disclosure, the term “available energy” refers to thechemical potential of a reactant species that is used in a chemicalreaction. The chemical potential is a term commonly used inthermodynamics, physics, and chemistry to describe the energy of asystem (particle, molecule, vibrational or electronic states, reactionequilibrium, etc.). However, more specific substitutions for the termchemical potential may be used in various academic disciplines,including Gibbs free energy (thermodynamics) and Fermi level (solidstate physics), etc. Unless otherwise specified, references to theavailable energy should be understood as referring to the chemicalpotential of the specified material.

According to U.S. Patent Publication No. 2007/0256635, CVD reactors aredisclosed in which an ammonia source is activated by UV light within thereactor. In the downflow reactors shown in this application, the UVsource activates the ammonia as it enters the reactor. These applicantsalso indicate that lower temperature reactions in their vacuum reactorscan be achieved thereby.

As is shown in U.S. Patent Publication No. 2006/0156983 and other suchdisclosures, it is known in plasma reactors of various types that highfrequency power can be applied to the electrodes therein in order toionize at least a portion of the reactive gas to produce at least onereactive species.

It is also known that lasers can be utilized to assist in chemical vapordeposition processes. For example, in Lee et al., “Single-phaseDeposition of a α-Gallium Nitride by a Laser-induced Transport Process,”J. Mater. Chem., 1993, 3(4), 347-351, laser radiation occurs parallel tothe substrate surface so that the various gaseous molecules can beexcited thereby. These gases can include compounds such as ammonia. InTansley et al., “Argon Fluoride Laser Activated Deposition of NitrideFilms,” Thin Solid Films, 163 (1988) 255-259, high energy photons areagain used to dissociate ions from a suitable vapor source close to thesubstrate surface. Similarly, in Bhutyan et al., “Laser-AssistedMetalorganic Vapor-Phase Epitaxy (LMOVPE) of Indium Nitride (InN),”phys. stat.sol. (a) 194, No. 2, 501-505 (2002), ammonia decomposition issaid to be enhanced at optimum growth temperatures in order to improvethe electrical properties of MOVPE-grown InN films. An ArF laser is usedfor this purpose for photodissociation of ammonia as well as organicprecursors, such as trimethylindium and the like.

The search has thus continued for improved CVD reaction processes inwhich reactants such as ammonia can be more effectively utilized ingreater percentages and improved films can be produced at the samereactor conditions as are currently employed.

SUMMARY OF THE INVENTION

In accordance with the present invention, these and other objects havenow been realized by the discovery of a method of depositing a compoundsemiconductor on a substrate comprising the steps of (a) maintaining thesubstrate in a reaction chamber; (b) directing a plurality of gaseousreactants within the reaction chamber from a gas inlet in a downstreamdirection toward a surface of the substrate, the plurality of gaseousreactants being adapted to react with one another at the surface of thesubstrate so as to form a deposit on the substrate; (c) selectivelysupplying energy to one of the plurality of gaseous reactants downstreamof the gas inlet and upstream of the substrate so as to impartsufficient energy to activate the one of the plurality of gaseousreactants but not sufficient to decompose the one of the plurality ofgaseous reactants; and (d) decomposing the plurality of gaseousreactants at the surface of the substrate. Preferably, the selectivelysupplied energy is selected from the group consisting of microwaveenergy and infrared energy.

In accordance with one embodiment of the method of the presentinvention, the selectively supplied energy is supplied at the resonantfrequency of the one of the plurality of gaseous reactants.

In accordance with another embodiment of the method of the presentinvention, the method includes directing the one of the plurality ofgaseous reactants to a preselected area of the substrate andsimultaneously selectively supplying the energy only to the preselectedarea of the substrate.

In accordance with another embodiment of the method of the presentinvention, the step of directing the plurality of gaseous reactantsincludes directing the reactants toward the substrate so that theplurality of gaseous reactants remain substantially separate from oneanother in at least a part of a flow region between the inlet and thesurface of the substrate, and maintaining the substrate in the reactionchamber includes the maintaining the substrate in motion. Preferably,the step of maintaining the substrate in motion includes rotating thesubstrate about an axis of rotation in the reaction chamber so that theplurality of gaseous reactants impinge on a surface of the substratewhich is parallel to the axis of rotation. In a preferred embodiment,the step of directing the plurality of gaseous reactants includesdirecting the reactants into separate zones of the reaction chamber andthe step of selectively supplying energy includes supplying energy toonly those zones where the one of the plurality of gaseous reactants issupplied and not to those zones where others of the plurality of gaseousreactants are supplied.

In accordance with one embodiment of the method of the presentinvention, the selectively applied energy is applied to the one of theplurality of reactants at an angle of between 0° and 90° with respect tothe axis of rotation. In one embodiment, the angle is about 0° withrespect to the axis of rotation. In another embodiment, the angle isabout 90° with respect to the axis of rotation. In other embodiments,the angle may be between 0° and 90° with respect to the axis ofrotation.

In accordance with the present invention, a method has also beendiscovered of depositing a compound semiconductor on a substratecomprising the steps of: (a) maintaining the substrate in a reactionchamber; (b) directing a plurality of gaseous reactants including aGroup V hydride and an organic compound of a Group III metal within thereaction chamber from a gas inlet in a downstream direction toward asurface of the substrate; (c) selectively supplying energy to the GroupV hydride downstream of the inlet and upstream of the substrate so as toimpart sufficient energy to activate the Group V hydride but notsufficient to decompose the Group V hydride; and (d) decomposing theplurality of gaseous reactants at the surface of the substrate. In apreferred embodiment, the selectively supplied energy is selected fromthe group consisting of microwave energy and infrared energy.

In accordance with one embodiment of the method of the presentinvention, the selectively supplied energy is supplied at the resonantfrequency of the Group V hydride. Preferably, the Group V hydridecomprises ammonia. In a preferred embodiment, the methods includesdirecting the Group V hydride to a preselected area of the substrate andsimultaneously selectively supplying the energy only to the preselectedarea of the substrate. In a preferred embodiment, the Group III metal isgallium, indium or aluminum. Preferably, the step of directing theplurality of gaseous reactants includes directing the reactants towardthe substrate so that the plurality of gaseous reactants remainsubstantially separate from one another in at least a part of a flowregion between the inlet and the surface of the substrate, andmaintaining the substrate in the reaction chamber includes maintainingthe substrate in motion. Preferably, the step of maintaining thesubstrate in motion includes rotating the substrate about an axis ofrotation in the reaction chamber so that the plurality of gaseousreactants impinge on a surface of the substrate transverse to the axisof rotation.

In accordance with one embodiment of the method of the presentinvention, the selectively applied energy is applied to the Group Vhydride at an angle of between 0° and 90° with respect to the axis ofrotation. In one embodiment, the angle is about 0° with respect to theaxis of rotation. In another embodiment, the angle is about 90° withrespect to the axis of rotation. In other embodiments, the angle can bean angle between 0° and 90° with respect to the axis of rotation. In apreferred embodiment, the step of directing the gaseous reactantsincludes directing the reactants into the separate zones of the reactionchamber and the step of selectively supplying energy includes supplyingenergy to only those separate zones where the Group V hydride issupplied and not to those zones where the organic compound of a GroupIII metal is supplied. In a preferred embodiment, the Group III metalcomprises indium.

In accordance with the present invention, a chemical vapor depositionreactor has been invented comprising (a) a reaction chamber; (b) asubstrate carrier mounted within the reaction chamber for rotation aboutan axis of rotation extending in upstream and downstream directions, thesubstrate carrier being arranged to hold one or more substrates so thatsurfaces of the one or more substrates face generally in the upstreamdirection; (c) a flow inlet element disposed upstream of the substratecarrier, the flow inlet element having a plurality of discharge zonesdisposed at different locations in directions transverse to the axis ofrotation, the flow inlet element being arranged to discharge differentgases through different ones of the plurality of discharge zones so thatthe discharged gases are directed generally downstream toward thesubstrate carrier in substantially separate streams at differentlocations relative to the axis of rotation and (d) selective energyinput apparatus arranged to supply energy selectively at locationsbetween the flow inlet element and the substrate carrier aligned with aselected one of the substantially separate streams to thereby supplyenergy selectively to the gas associated with the selected one of thesubstantially separate streams. In a preferred embodiment, the selectiveenergy input apparatus is a microwave or infrared energy generation.Preferably, the selective energy input apparatus is arranged to supplythe energy at a wavelength which is substantially absorbed by the gasassociated with the selected one of the substantially separate streams.Preferably, the energy is substantially not absorbed by the others ofthe substantially separate streams.

In accordance with one embodiment of the reactor of the presentinvention, the selective energy input apparatus is arranged to direct abeam of the energy along one or more beam paths having components indirections transverse to the axis of rotation. In a preferredembodiment, the one or more beam paths are arranged to intercept theselected streams adjacent to the surface of the substrate carrier.

In accordance with one embodiment of the reactor of the presentinvention, the selective energy input apparatus is arranged to directbeams of the energy along one or more beam paths having components indirections parallel to the axis of rotation. In another embodiment, theselective energy input apparatus is arranged to direct beams of theenergy along one or more beam paths having components in directions atan angle between about 0° and 90° with respect to the axis of rotation.In yet another embodiment of the apparatus of the present invention, theselective energy input apparatus is arranged to direct beams of theenergy along one or more beam paths having components in directions atan angle of about 90° with respect to the axis of rotation.

BRIEF DESCRIPTION OF THE DRAWINGS

The present invention can be more fully appreciated with reference tothe following detailed description, which in turn refers to the Figuresin which:

FIG. 1 is a side, elevational, partial, sectional view of a reactor inaccordance with the present invention;

FIG. 2 is a bottom, elevational view of a portion of the reactor shownin FIG. 1;

FIG. 3 is a partial, enlarged, elevational view of a portion of the gasinlet in a reactor in accordance with the present invention;

FIG. 4 is a partial, side, perspective view of a portion of the internalreactor in accordance with the present invention; and

FIG. 5 is a top, elevational representational view of a portion of therotating disk of a reactor in accordance with the present invention.

DETAILED DESCRIPTION

The present invention particularly refers to the selective applicationof energy to one or more of the gaseous reactants utilized in MOCVDapparatus for the formation of compound semiconductors. In particular,the present invention specifically utilizes microwave or IR radiationfor this purpose. Microwave energy is generally known to refer toelectromagnetic waves having wavelengths ranging from as long as onemeter down to as short as one millimeter or equivalently withfrequencies between 300 megahertz and 300 gigahertz. Infrared radiation,on the other hand, is generally known to be electromagnetic radiationwith wavelengths longer than that of visible light (400 to 700 nm) butshorter than that of terahertz radiation (100 μm to 1 mm) andmicrowaves. In accordance with the present invention, the term microwaveradiation is thus intended to specifically include terahertz radiation;namely, thus including the area between about 300 gigahertz and 3terahertz corresponding to the sub-millimeter wavelength range fromabout 1 mm, which is usually referred to as the high frequency edge ofthe microwave band, and 100 micrometer (which is the long wavelengthedge of the far infrared light band).

One form of MOCVD apparatus which is commonly employed in formation ofcompound semiconductors is depicted schematically in FIG. 1. Thisapparatus includes a reaction chamber 10 having a spindle 12 rotatablymounted therein. The spindle 12 is rotatable about an axis 14 by arotary drive mechanism 16. Axis 14 extends in an upstream direction Uand a downstream direction D. A substrate carrier, typically in the formof a disc-like wafer carrier 18, is mounted on the spindle for rotationtherewith. Typically, the substrate carrier and spindle rotate at about100-2000 revolutions per minute. The substrate carrier is adapted tohold numerous disc-like wafers 20 so that surfaces 22 of the wafers arein a plane perpendicular to axis 14 and face in the upstream direction.A heater 26, as for example, a resistance heating element, is disposedwithin the reaction chamber for heating the wafer carrier. A flow inletelement 28 is mounted upstream of the substrate carrier and spindle. Theflow inlet element is connected to sources 30, 32, and 34 of the gasesused in the process. The flow inlet element directs streams of thevarious gases into the reaction chamber. In a region of the reactionchamber near the flow inlet element 28, referred to herein as the “flowregion” 37, the streams of gases pass generally downstream toward thesubstrate carrier 18 and wafers 20. Preferably, this downward flow doesnot result in substantial mixing between separate streams of downwardlyflowing gas. Desirably, the flow in flow region 37 is laminar. As thesubstrate carrier 18 is rotating rapidly, the surface of the substratecarrier and the surfaces of the wafers are likewise moving rapidly. Therapid motion of the substrate carrier and wafers entrains the gases intorotational motion around axis 14, and radial flow away from axis 14, andcauses the gases in the various streams to mix with one another within aboundary layer schematically indicated at 36 in FIG. 1. Of course, inactual practice, there is a gradual transition between the generallydownstream flow regime denoted by arrows 38 in the flow region 37 andthe rapid rotational flow and mixing in the boundary layer 36. However,the boundary layer can be regarded as the region in which the gases flowsubstantially parallel to the surfaces of the wafers. Under typicaloperating conditions, the thickness t of the boundary layer is about 1cm or so. By contrast, the distance d from the downstream face of flowinlet element 28 to the surfaces 22 of the wafers commonly is about 5-8cm.

The thickness of the boundary layer is thus substantially less than thedistance d between the flow inlet element 28 and the substrate carrier18, so that the flow region 37 occupies the major portion of the spacebetween the flow inlet element 28 and the substrate carrier. Therotational motion of the substrate carrier pumps the gases outwardlyaround the peripheral edges of the wafer carrier, and hence the gasespass downstream to an exhaust system 40. Typically, the reaction chamberis maintained under absolute pressures from about 25-1000 Torr, and mosttypically at about 100-760 Torr. Furthermore, in connection with thedisassociation of Group III hydrides and alkyls of the Group V metals,such as is the production of InGaN and GaN LEDs, the reaction chambersare maintained at temperatures from 500 to 1,100° C.

The flow inlet element 28 is maintained at a relatively low temperature,typically about 60° C. or less, although higher temperatures can beused, to inhibit the decomposition or other undesired reactions of thereactants, in the flow inlet element and in the flow region. Also, thewalls of reaction chamber 10 are typically cooled to about 25° C. It isdesirable to minimize the rate of any reactions of the gases in the flowregion 38 remote from the substrate carrier 18. Because the residencetime of the gases in the boundary layer 36 is brief, it is desirable topromote rapid reaction between the gases in the boundary layer 36, andparticularly at the surfaces of the wafers. In a conventional system,the energy for reaction, as for example, the energy for dissociation ofa Group V hydride such as NH₃ to form reactive intermediates such as NH₂and NH, is provided substantially only by heat transfer from thesubstrate carrier and wafers. Thus, higher temperatures of the substratecarrier and wafers tend to increase the speed of the reaction.

However, increasing the temperature of the wafer carrier and wafers alsotends to increase dissociation of the deposited compound semiconductors,as for example, resulting in the loss of nitrogen from thesemiconductor. This phenomenon is particularly severe in the case ofindium-rich compounds such as InGaN and InN. Thus, in this case thesecompounds have a high equilibrium N₂ vapor pressure making highertemperature growth far more difficult. The nitrogen thus prefers to bein the gas phase in the form of N₂, and this problem increases withincreased temperature, resulting in N-vacancies shortening the lifetimeof the devices and reducing their performance.

In addition, in connection with these devices the residence time for thevarious components at the substrate surface is extremely short. Theshorter the residence time, the more inefficient the process becomes.Thus, the amount of Group V hydrides such as ammonia required to depositsufficient N on the substrate becomes greater and greater, and theamount of unreacted NH₃ becomes concomitantly greater. On the otherhand, longer residence times are also inefficient. Thus, with longerresidence times the probability of a gas phase reaction between thereactants, such as, for example, a Group V hydride and an alkyl of aGroup III metal compound can occur, forming adducts which can eventuallyform particles and thus eliminate these materials from the reactants.

In accordance with the present invention, the selective activation of,for example, the Group V hydride, such as NH₃, and increasing theavailable energy of this reactant is intended to improve thedecomposition efficiency at low residence times and thus improve thedecomposition at the surface of the substrate to provide greater radicalN-containing species to form stoichiometric GaN, for example, and toreduce the N-vacancies in the ultimate product. Increasing the residencetime is undesirable because the earlier breakdown of the hydride resultsin the formation of N₂ and H₂, for example (from ammonia), so that the Nis no longer available for incorporation into the substrate. N₂ and H₂gases are thus far too stable to react with the Group III metal organiccompounds. The concept of the present invention is thus to preventpremature decomposition of the Group V hydride compounds as they flowtowards the substrate, but at the same time to maximize suchdecomposition as close to the surface of the substrate as possibleduring the short residence time of the gas streams at that surface. Thisis accomplished in accordance with the present invention by selectiveactivation either by microwave or infrared radiation specific to thesecompounds, so that as these compounds approach the substrate surfacetheir available energy increases, and the energy necessary for theirdecomposition decreases. Decomposition is thus readily triggered atthese surfaces by the increased temperatures at that location. In otherwords, the infrared or microwave radiation is applied selectively to theselected reactant, such as the Group V hydride compounds, so thatinsufficient energy is applied by these sources themselves to decomposethese compounds, but sufficient energy is applied to activate them. Thisis believed to occur by causing vibration of these molecules generatingheat thereby.

Application of this energy in the form of infrared or microwaveradiation is carried out in a manner such that the energy canselectively impact the desired species of gases which are intended to beactivated at or near the surface of the substrate. The direction ofapplication of this energy, however, is not a critical limitation. Thatis, the energy can be applied at an angle of from 0° to 90° with respectto the substrate surfaces, or with respect to the axis of rotation ofthe wafer carrier. The energy can thus be applied parallel to thesurface at or near the substrate or significantly above the boundarylayer, or it can be applied at a transverse angle to the substratesurface, or it an be applied directly perpendicular to the substratesurface. Because the particular beams of energy comprising infrared ormicrowave radiation in connection with the present invention possessenergies which are low enough so that surface degradation will generallynot be an issue, the energy can, for example, be applied directlyperpendicular to the substrate surface without serious concerns. Inconnection with various other forms of energy, such as UV light, forexample, beams directed directly perpendicular to the substrate surfacecould be detrimental to the reaction process because of their highenergy. As noted, however, on the other hand, it is also possible to usetransverse beams or beams directed parallel to the substrate surface inconnection with the present invention.

Turning once again to FIG. 1, energy in the form of microwave orinfrared radiation is applied to the Group V hydride, for example, froman energy activator such as energy activator 31 a or energy activator 31b, as shown in FIG. 1. The energy can thus be applied from energyactivator 31 a from directly above the wafer carrier 18 in a directionparallel to the axis of rotation U of the carrier and thus directlyperpendicular to the surfaces of the wafers 20. Alternatively, thisenergy can be applied from energy activator 31 b in a direction parallelto the surface of the wafer carrier 18 and thus perpendicular to theaxis of rotation U across the surface of the wafers 20. In an alternateembodiment which is discussed below with reference to FIG. 5, the energycan also be applied from energy activators located at alternatepositions between energy activators 31 a and 31 b so as to be appliedtransverse or angularly with respect to the axis of rotation U at anglesfrom about 0° to 90° with respect to that axis of rotation against thesurface of the wafer carrier 18 and thus that of the wafers 20themselves.

Selective application of the energy to one or more of the gases withoutapplying it to all of the gases is facilitated by introducing the gasesseparately in different regions of the reactor. For example, the flowinlet element 28 may be arranged as seen in FIG. 2. FIG. 2 is a viewlooking upstream toward the flow inlet element, in the directionindicated by line 2-2 in FIG. 1. In this arrangement, the flow inletelement 28 has elongated discharge zones 50 extending generally radiallywith respect to the axis 14. These discharge zones are used to dischargethe organometallic reactant, typically in admixture with a carrier gassuch as nitrogen. For example, the flow inlet element may have elongatedslot-like discharge openings or rows of small circular dischargeopenings extending within the elongated zones 50. The flow inlet element28 also has further discharge zones 52 generally in the form ofquadrants of a circular pattern arranged around axis 14, these zonesbeing indicated by the cross-hatched areas in FIG. 2. For example, theflow inlet elements may have numerous discharge ports arranged withineach of these zones. In operation, streams of downwardly flowingorganometallic gases are present in those portions of the flow region 37(FIG. 1) aligned with zones 50, whereas streams of downwardly flowinghydrides such as ammonia are present in those areas of the flow region37 aligned with the hydride discharge zones 52. Energy can beselectively applied to the hydride by directing the energy only intothose portions of the flow region aligned with discharge zones 52. Forexample, a microwave or infrared source (not shown) may be arranged toapply microwave or infrared energy only within a radiation region orenergy application zone 54, as shown in FIG. 2, or within a smallerenergy application region 56, also depicted in FIG. 2. Although only tworadiation regions are depicted in FIG. 2, a typical reactor wouldincorporate a radiation region aligned with each of the discharge zones52.

As shown schematically in FIG. 3, a flow inlet element 128 may havenumerous discharge zones in the form of elongated strips or stripesextending along the flow inlet element 128 (FIG. 3) in directionstransverse to the axis 14. The flow inlet has elongated zones 150, usedin this embodiment for supplying a gas containing the metal organic. Theflow inlet element also has elongated discharge zones 152, which in thisembodiment are used for supplying the Group V hydride. The elongateddischarge zones are interspersed with one another, and extend parallelto one another. Each such elongated discharge zone may include anelongated slot for discharging the appropriate gas or a set of holes orother discrete openings arranged along the direction of elongation ofthe zone. Although only a few of the zones are depicted in FIG. 3, thepattern of flow inlet zones may encompass most or all of the area of theflow inlet element.

The flow inlet element may also include additional elongated dischargezones 154, which are connected to a source of an inert gas. As used inthis disclosure, the term “inert gas” refers to a gas which does notsubstantially participate in the reaction. For example, in deposition ofa III-V semiconductor, gases such as N₂, H₂, He or mixtures of thesegases may serve as inert gases. Inert gases are also referred to hereinas “carrier gases.” The discharge zones 154, used for discharging theinert or carrier gases, are interspersed with the discharge zones 150and 152 used for the other gases, so that a discharge zone 154 forcarrier gas is positioned between each discharge zone 150 for theorganometallic gases and the next adjacent discharge zone 152. The gasesdischarged from these various discharge zones pass downwardly throughthe flow region 37 of the reactor as generally slab-like streams of gasflowing generally in parallel planes without mixing with one another. Anidealized representation of such a flow is seen in FIG. 4, which shows aflow of metal organic gas 250 moving downstream within the flow region37 in parallel with a flow of hydride 252, and with a flow of carriergas 254 disposed between them. In this figure, the feature indicated as“purge/curtain” may indicate the optional carrier gas discharge zonesand the flow extending from them. In the alternative, solid barriers mayextend downstream somewhat from the flow inlet element, denoted “coldplate (top flange).”

Where microwave or IR energy is directed into one of the flows of gases,it is desirable to apply that energy in such a manner that the radiantenergy reaches regions of the flowing gas disposed at various radialdistances from the axis of rotation 14. However, this radiant energywhich is applied typically has a wavelength which is selected so thatthe radiant energy is substantially interactive with the species to beenergized. Thus, the radiant energy will be strongly absorbed by theflowing gas containing that species. As seen in FIG. 5, the flow inletelement is arranged to provide two streams of first gas 352, commonly inthe form of a quadrant. The gas in stream 352 may be, for example,ammonia or another hydride. Here again, the flow inlet element isarranged to provide streams 350A and 350B of another, second gas such asa metal organic. These streams may extend along the borders of thestreams 352. The flow inlet element may also be arranged to providefurther streams 354 of a further, carrier gas, also arranged to occupyquadrants about the axis of rotation 14. As shown, the radiant energysources, such as microwave or IR radiation sources, may be arranged todirect radiant energy which is at a wavelength that is strongly absorbedby the gas in stream 352 but which is not strongly absorbed by the gasesin streams 350 and 354. This radiant energy may be directed throughstreams 354 and 350 so as to impinge on borders 360 of streams 352,which borders have a substantial radial extent, towards and away fromthe central axis 14, or the axis of rotation. The radiant energy passesthrough the streams 350 and 354, but is not substantially absorbed bythe gases in those streams. Because the radiant energy impinges onborders 360 along their radial extent, the radiant energy is absorbed byportions of the gas lying at all radial distances from central axis 14.As further discussed below, it may be desirable to assure that theradiant energy is absorbed by an interaction with a gas stream near thelower end of the flow region, and near the upper boundary of theboundary layer 36. In the embodiment of FIG. 5, the radiant energysources 356 direct the beams of radiant energy in directions which liein a plane perpendicular to the axis of rotation 14, i.e., a planegenerally parallel to the surfaces 22 of the wafers (FIG. 1) and theupper surface of the substrate carrier 18. It is not essential that thebeams of radiant energy be directed exactly in such a plane, but in theembodiment of FIG. 5, it is desirable that the direction of the radiantenergy have a substantial component in such a plane. Therefore, theradiant energy beams may be directed in a plane transverse to thecentral axis 14, so that they intersect borders 360 near the boundarylayer 36. If the radiant energy is directed in a plane generallyparallel to the surfaces of the wafers, it is possible to avoiddirecting the radiant energy onto the surfaces of the wafers. Thislimits or avoids undesired effects of the radiant energy on the wafersurfaces. However, as discussed above, with the relatively low energysources described here, there will be minimal adverse effect on thewafer surface. This permits one to again apply the energy at a range ofangles with respect to the axis of rotation of the substrate carrier offrom 0° to 90°.

In a variant of this arrangement, streams 350B may be omitted, whereasstreams 350A are arranged as shown. Thus, each stream 352 of the firstreactant gas borders a stream 354 of the inert or carrier gas at oneradially-extensive border 360B. The radiant energy is directed throughthe streams 354 of the inert or carrier gas, and enters the streams offirst gas through borders 360B. In this variant, the radiant energypasses into the first gas 352 without passing through a stream 350 ofthe second reactant gas. This arrangement may be used, for example,where the second reactant gas would substantially absorb the radiantenergy. For example, IR light at wavelengths which will specificallyexcite NH₃ can be employed. Thus, the IR light can be coupled directlyto the residence frequency of ammonia, which may or may not be the sameresidence frequency for the metal organics. This will, of course, dependon the specific metal organics which are being utilized. They can beselected so that they will not absorb the IR light at the particularwavelength utilized. On the other hand, in the case of microwave energy,since metal organics and ammonia are both nonpolar, they will bothabsorb the same frequencies of microwave energy, while polar moleculessuch as nitrogen and hydrogen will not absorb microwave energy. Onceagain, these factors can be utilized to select the optimum IR ormicrowave energy to be utilized in any particular case.

As depicted schematically in FIG. 4, the radiant energy R may bedirected into the reaction chamber through one of the planar streams ofgas 250, 254, which do not substantially interact with the radiantenergy, and may be directed at an oblique angle to the theoretical planeof the target gas stream 252 which is to absorb the radiant energy. Theradiant energy R enters stream 252 near the boundary layer 36, and hencenear the lower end of the flow region 37, and hence the radiant energyis absorbed near the boundary layer.

Typically, the reactants are introduced into the reaction chamber at arelatively low temperature, and hence have low available energy, wellbelow that required to induce rapid reaction of the reactants. In aconventional process, there may be some heating of the reactants byradiant heat transfer as the reactants pass downstream from the inlettowards the boundary layer. However, most of the heating, and hence mostof the increase in available energy of the reactants, occurs within theboundary layer. Moreover, all of the heating depends upon thetemperature of the substrate carrier and wafers. By contrast, in theembodiments discussed above, substantial energy is supplied to at leastone of the reactants while the reactant is in the flow region, suchenergy being supplied by means other than heat transfer from thesubstrate carrier, substrates, and reactor walls. Further, the locationwhere the energy is applied can be controlled. By applying the energy tothe reactant or reactants near the transition between the flow regionand the boundary layer, the time between the moment that a given portionof a reactant reaches a high available energy and the time when thatportion encounters the wafer surface can be minimized. This, in turn,can help to minimize undesired side reactions. For example, ammoniahaving high available energy may spontaneously decompose into speciessuch as NH₂ and NH, and then these species in turn may decompose tomonatomic nitrogen, which very rapidly forms N₂. N₂ is essentiallyunavailable for reaction with a metal organic. By applying the energy tothe ammonia just before or just as the ammonia enters the boundarylayer, the desired reactions which deposit the semiconductor at thesurface, such as reaction of the excited NH₃ with the metal organic orreaction of NH₂ or NH species with the metal organic at the wafersurface, can be enhanced, whereas the undesirable side reaction can besuppressed.

Moreover, because energy is applied to one or more of the reactants bymeans other than energy transfer such as heat transfer from thesubstrate carrier and wafers, the available energy of the reactants canbe controlled, at least to some degree, independently of the temperatureof the substrates. Thus, the available energy of the reactants in theboundary layer can be increased without increasing the temperature ofthe wafers and the substrate carrier, or conversely, the wafers and thesubstrate carrier can be maintained at a lower temperature while stillmaintaining an acceptable level of available energy. Of course, there istypically some energy input from the substrate carrier and from thewafers to the reactants.

When applying microwave energy in accordance with the present invention,the energy can be applied as either a coherent or diffuse beam. The beamcan be applied parallel to the surface of the substrate, at a locationnear the substrate or significantly above the boundary layer, or can beperpendicular to the substrate, or at any angle between theperpendicular and parallel positions with respect to the substrate. Themicrowave energy can be applied at various heights from the substratesurface. Furthermore, microwaves can originate from one or a number ofsources and these can be controlled in order to interact with more thanone of the reactants. Thus, for example, in the case of Group V hydridesand alkyls of Group III metals, microwave sources can be controlled tointeract with one or more of these sources.

Similarly, in the case of infrared energy, it can also be applied as acoherent or diffuse beam, again either parallel to the substrate,perpendicular to the substrate, or at any angle therebetween. Onceagain, infrared energy can be applied at varying heights from thesubstrate surface independent of the orientation of the beam, and it canoriginate from one or more sources and can be controlled to interactwith one or more of the reactants.

Although the invention herein has been described with reference toparticular embodiments, it is to be understood that these embodimentsare merely illustrative of the principles and applications of thepresent invention. It is therefore to be understood that numerousmodifications may be made to the illustrative embodiments and that otherarrangements may be devised without departing from the spirit and scopeof the present invention as defined by the appended claims.

1. A chemical vapor deposition reactor comprising: (a) a reactionchamber; (b) a substrate carrier mounted within said reaction chamberfor rotation about an axis of rotation extending in upstream anddownstream directions, said substrate carrier being arranged to hold oneor more substrates so that surfaces of said substrates face generally inthe upstream direction; (c) a flow inlet element disposed upstream ofthe substrate carrier, said flow inlet element having a plurality ofdischarge zones disposed at different locations in directions transverseto said axis of rotation, said flow inlet element being arranged todischarge different gases through different ones of said plurality ofdischarge zones so that said discharged gases are directed generallydownstream toward said substrate carrier in substantially separatestreams at different locations relative to said axis of rotation; and(d) selective energy input apparatus arranged to supply energyselectively at locations between said flow inlet element and saidsubstrate carrier aligned with a selected one of said substantiallyseparate streams to thereby supply energy selectively to said gasassociated with said selected one of said substantially separatestreams.
 2. The reactor of claim 1 wherein said selective energy inputapparatus is selected from the group consisting of microwave andinfrared energy generators.
 3. The reactor of claim 1 wherein saidselective energy input apparatus is arranged to supply said energy at awavelength which is substantially absorbed by said gas associated withsaid selected one of said substantially separate streams.
 4. The reactorof claim 1 wherein said energy is substantially not absorbed by theothers of said substantially separate streams.
 5. The reactor of claim 1wherein said selective energy input apparatus is arranged to directbeams of said energy along one or more beam paths having components indirections transverse to said axis of rotation.
 6. The reactor of claim5 wherein said one or more beam paths are arranged to intercept saidselected one of said separate streams adjacent to said surface of saidsubstrate carrier.
 7. The reactor of claim 1 wherein said selectiveenergy input apparatus is arranged to direct beams of said energy alongone or more beam paths having components in directions parallel to saidaxis of rotation.
 8. The reactor of claim 1 wherein said selectiveenergy input apparatus is arranged to direct beams of said energy alongone or more beam paths having components in directions at an anglebetween about 0° and 90° with respect to said axis of rotation.
 9. Thereactor of claim 1 wherein said selective energy input apparatus isarranged to direct beams of said energy along one or more beam pathshaving components in a direction at an angle of about 90° with respectto said axis of rotation.